Abstract

DUARTE, Julio Enrique et al. Optical fiber metrology to small displacements detection. Rev.fac.ing.univ. Antioquia [online]. 2010, n.56, pp.151-159. ISSN 0120-6230.

This work presents a methodology to measure deflections in the range of microns in thermo-pneumatic silicon micomembranes. This method is based on the fiber optic interferometry, which was used to study the static behavior of a silicon membrane of 10 µm in thickness, 5 µm in side length and 300 µm in bulk, which was glued to a glass slide. Static behavior is defines as the membrane deflection measurement taking into account only its response to the infrared radiation energy that drives them.

Keywords : Interferometry; silicon micromenbrane; optical fiber.

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