Services on Demand
Journal
Article
Indicators
Cited by SciELO
Access statistics
Related links
Cited by Google
Similars in SciELO
Similars in Google
Share
Revista Facultad de Ingeniería Universidad de Antioquia
Print version ISSN 0120-6230On-line version ISSN 2422-2844
Abstract
DUARTE, Julio Enrique et al. Optical fiber metrology to small displacements detection. Rev.fac.ing.univ. Antioquia [online]. 2010, n.56, pp.151-159. ISSN 0120-6230.
This work presents a methodology to measure deflections in the range of microns in thermo-pneumatic silicon micomembranes. This method is based on the fiber optic interferometry, which was used to study the static behavior of a silicon membrane of 10 µm in thickness, 5 µm in side length and 300 µm in bulk, which was glued to a glass slide. Static behavior is defines as the membrane deflection measurement taking into account only its response to the infrared radiation energy that drives them.
Keywords : Interferometry; silicon micromenbrane; optical fiber.